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Nanostructuring using colloidal crystals and dry and wet etching

Manuel Gonçalves (*)
Moritz Trautvetter(+)
Oliver Dubbers(+)
Sebastian Fricker(+)
Alfred Plettl(+)
Othmar Marti(*)
Paul Ziemann(+)

(*) Department of Experimental Physics
(+) Department of Solid State Physics
University of Ulm
D-89069 Ulm, Germany





Othmar Marti
Experimentelle Physik
Universiät Ulm